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Proceedings Paper

Two-plane-parallel fixed electrodes micromachined tunable oscillator
Author(s): Yee Chong Loke; Ai Qun Liu; Kim Miao Liew; Q. Zou
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Paper Abstract

High frequency, micromechanical bandpass filter, with tunable frequency and bandwidth are demonstrated in a polysilicon surface micromachining technology. These filter utilized a parallel-resonator architecture, in which properly phased outputs from two or more micromechanical resonators are combined to yield a desired filter spectrum. Damping effect was shown to have a significance factor in affecting the flat passband of the filter and will be further analyzed in this paper.

Paper Details

Date Published: 5 April 2001
PDF: 8 pages
Proc. SPIE 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, (5 April 2001); doi: 10.1117/12.425368
Show Author Affiliations
Yee Chong Loke, Nanyang Technological Univ. (Singapore)
Ai Qun Liu, Nanyang Technological Univ. (Singapore)
Kim Miao Liew, Nanyang Technological Univ. (Singapore)
Q. Zou, Univ. of Hawaii at Manoa (United States)

Published in SPIE Proceedings Vol. 4408:
Design, Test, Integration, and Packaging of MEMS/MOEMS 2001
Bernard Courtois; Jean Michel Karam; Steven Peter Levitan; Karen W. Markus; Andrew A. O. Tay; James A. Walker, Editor(s)

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