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Proceedings Paper

Design of a new in-plane microactuator for airflow control applications
Author(s): Michel de Labachelerie; Fransois Bastien; C. Edouard
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Paper Abstract

For airflow control applications, it is necessary to design robust MEMS actuators which could be placed on the wings of aircrafts. In this paper, we concentrate on in-plane actuators that are supposed to be an efficient solution for airflow control, and we present a design which uses a MEMS actuator embedded in a polymer layer which enables its in-plane movement. The knowledge of polymers mechanical characteristics -- and especially their behavior versus frequency -- is necessary for the design of such an actuator. We have determined these characteristics experimentally in order to be able to describe properly the actuator. With these measured values, we have explored two possible designs which are found to produce displacements of a 10 - 20 microns for a 3 mm actuator's total dimensions. Their frequency response is mainly limited to 2 to approximately 5 kHz by the increase of the polymer's stiffness.

Paper Details

Date Published: 5 April 2001
PDF: 9 pages
Proc. SPIE 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, (5 April 2001); doi: 10.1117/12.425366
Show Author Affiliations
Michel de Labachelerie, LPMO/CNRS (France)
Fransois Bastien, LPMO/CNRS (France)
C. Edouard, LPMO/CNRS (France)

Published in SPIE Proceedings Vol. 4408:
Design, Test, Integration, and Packaging of MEMS/MOEMS 2001
Bernard Courtois; Jean Michel Karam; Steven Peter Levitan; Karen W. Markus; Andrew A. O. Tay; James A. Walker, Editor(s)

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