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Proceedings Paper

MEMS torsion: mirrors, nanoprobes, and failure (Abstract Only)
Author(s): Noel C. MacDonald
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Paper Abstract

MicroElectroMechanical Systems made from single crystal silicon, and operated in torsion are used to rotate micro- mirrors for adaptive optics and for optical switching, to measure atomic forces, and to characterize the silicon at the micro/nm-scale. The design and characterization of torsion actuators for a mirror array and a scanning probe z-motion actuator will be discussed.

Paper Details

Date Published: 5 April 2001
PDF: 1 pages
Proc. SPIE 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, (5 April 2001); doi: 10.1117/12.425363
Show Author Affiliations
Noel C. MacDonald, Univ. of California/Santa Barbara (United States)

Published in SPIE Proceedings Vol. 4408:
Design, Test, Integration, and Packaging of MEMS/MOEMS 2001
Bernard Courtois; Jean Michel Karam; Steven Peter Levitan; Karen W. Markus; Andrew A. O. Tay; James A. Walker, Editor(s)

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