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Proceedings Paper

Low-voltage vibratory microgyroscope with ASIC control
Author(s): Yung C. Liang; Tao Zhao; Yong P. Xu; Siau S. Boh
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Paper Abstract

A low-voltage bulk micromachined microgyroscope is presented in this paper. An ASIC (Application Specific Integrated Circuit) is integrated on the same silicon die to minimize the parasitic effect ant to ensure the high sensitivity of the microgyroscope. In addition, a comparison between comb- actuation and parallel-plate actuation was made mathematically to describe the system dynamics clearly. Constraints on the sensitivity and actuation voltage are extremely crucial to modern low-rate high-resolution microgyroscopes used in aerospace applications.

Paper Details

Date Published: 5 April 2001
PDF: 10 pages
Proc. SPIE 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, (5 April 2001); doi: 10.1117/12.425357
Show Author Affiliations
Yung C. Liang, National Univ. of Singapore (Singapore)
Tao Zhao, National Univ. of Singapore (Singapore)
Yong P. Xu, National Univ. of Singapore (Singapore)
Siau S. Boh, National Univ. of Singapore (Singapore)


Published in SPIE Proceedings Vol. 4408:
Design, Test, Integration, and Packaging of MEMS/MOEMS 2001
Bernard Courtois; Jean Michel Karam; Steven Peter Levitan; Karen W. Markus; Andrew A. O. Tay; James A. Walker, Editor(s)

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