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Proceedings Paper

Development of a workstation for optical testing and modification of IMEMS on a wafer
Author(s): John Hedley; Alun J. Harris; James S. Burdess; Mark E. McNie
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Paper Abstract

A workstation for the testing and modification of IMEMS, incorporating a laser vibrometer, surface profiler and a laser for ablation, is described. Initial results have demonstrated the ability to do dynamic and static testing rapidly at the wafer level. Electrostatic actuation is shown to be one feasible method of driving the devices on a wafer; the other methods are being explored.

Paper Details

Date Published: 5 April 2001
PDF: 7 pages
Proc. SPIE 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, (5 April 2001); doi: 10.1117/12.425356
Show Author Affiliations
John Hedley, Univ. of Newcastle-upon-Tyne (United Kingdom)
Alun J. Harris, Univ. of Newcastle-upon-Tyne (United Kingdom)
James S. Burdess, Univ. of Newcastle-upon-Tyne (United Kingdom)
Mark E. McNie, Defence Evaluation Research Agency Malvern (United Kingdom)


Published in SPIE Proceedings Vol. 4408:
Design, Test, Integration, and Packaging of MEMS/MOEMS 2001
Bernard Courtois; Jean Michel Karam; Steven Peter Levitan; Karen W. Markus; Andrew A. O. Tay; James A. Walker, Editor(s)

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