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Proceedings Paper

Concepts, characterization, and modeling of MEMS microswitches with gold contacts in MUMPs
Author(s): Xavier Lafontan; Christian Dufaza; Michel Robert; Francis Pressecq; Guy Perez
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Paper Abstract

This paper demonstrates that RF MEMS micro-switches can be realized with a low cost MEMS technology such as MUMPs. Two different switches are proposed, namely the hinged beam switch and the gold overflowing switch. Their concepts, design and characterization are described in details. On-resistance as low as 5 - 6 (Omega) for the gold overflowing switch and 2 - 3 (Omega) for the hinged beam switch have been measured. Finally, experimental measurements showed that force and electrical current had strong influences on the overall electrical contact.

Paper Details

Date Published: 5 April 2001
PDF: 10 pages
Proc. SPIE 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, (5 April 2001); doi: 10.1117/12.425354
Show Author Affiliations
Xavier Lafontan, Lab. d'Informatique, de Robotique et de Microelectronique de Montpellier and Ctr. National (France)
Christian Dufaza, Lab. d'Informatique, de Robotique et de Microelectronique de Montpellier (France)
Michel Robert, Lab. d'Informatique, de Robotique et de Microelectronique de Montpellier (France)
Francis Pressecq, CNRS (France)
Guy Perez, CNRS (France)


Published in SPIE Proceedings Vol. 4408:
Design, Test, Integration, and Packaging of MEMS/MOEMS 2001
Bernard Courtois; Jean Michel Karam; Steven Peter Levitan; Karen W. Markus; Andrew A. O. Tay; James A. Walker, Editor(s)

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