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Proceedings Paper

Top-down design flow for MOEMS
Author(s): Gunar Lorenz; Arthur S. Morris; Issam Lakkis
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Paper Abstract

As MOEMS (Micro-Opto-Electro-Mechanical Systems) transition from laboratory curiosities to production products inserted into telecommunication systems, a top down design flow is necessary to minimize time-to-market. We present a structured- custom approach for MOEMS design based on the concept of using parameterized behavioral models as a means to improve and speed up the design process. This approach enables a user to quickly explore a larger design space on the interaction of the behavioral models with their surrounding system. Once the simulation is completed to the designer's satisfaction, a device layout can be output for FEM verification on critical areas or to generate the masks for fabrication.

Paper Details

Date Published: 5 April 2001
PDF: 12 pages
Proc. SPIE 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, (5 April 2001); doi: 10.1117/12.425351
Show Author Affiliations
Gunar Lorenz, Coventor, Inc. (United States)
Arthur S. Morris, Coventor, Inc. (United States)
Issam Lakkis, Coventor, Inc. (United States)


Published in SPIE Proceedings Vol. 4408:
Design, Test, Integration, and Packaging of MEMS/MOEMS 2001
Bernard Courtois; Jean Michel Karam; Steven Peter Levitan; Karen W. Markus; Andrew A. O. Tay; James A. Walker, Editor(s)

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