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Proceedings Paper

Dynamic simulation of optical MEM switches
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Paper Abstract

Micro-optical-electrical-mechanical systems (MOEMS) present a new set of challenges for systems on a chip (SoC) and mixed- technology designers including the need for mixed-signal multi-domain simulation. We present new modeling techniques for optical and mechanical MEM components and apply these models to the simulations of a MOEMS switch for optical fiber telecommunications applications.

Paper Details

Date Published: 5 April 2001
PDF: 12 pages
Proc. SPIE 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, (5 April 2001); doi: 10.1117/12.425349
Show Author Affiliations
Timothy P. Kurzweg, Univ. of Pittsburgh (United States)
Jose A. Martinez, Univ. of Pittsburgh (United States)
Steven Peter Levitan, Univ. of Pittsburgh (United States)
Philippe J. Marchand, Optical Micro Machines (United States)
Donald M. Chiarulli, Univ. of Pittsburgh (United States)


Published in SPIE Proceedings Vol. 4408:
Design, Test, Integration, and Packaging of MEMS/MOEMS 2001
Bernard Courtois; Jean Michel Karam; Steven Peter Levitan; Karen W. Markus; Andrew A. O. Tay; James A. Walker, Editor(s)

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