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Proceedings Paper

Design and coupled-effect simulations of CMOS micro gas sensors built on SOI thin membranes
Author(s): Chih-Cheng Lu; Florin Udrea; Julian W. Gardner; D. Setiadi; T. Dogaru; T. H. Tsai; James A. Covington
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Paper Abstract

This paper describes coupled-effect simulations of smart micro gas-sensors based on standard BiCMOS technology. The smart sensor features very low power consumption, high sensitivity and potential low fabrication cost achieved through full CMOS integration. For the first time the micro heaters are made of active CMOS elements (i.e. MOSFET transistors) and embedded in a thin SOI membrane consisting of Si and SiO2 thin layers. Micro gas-sensors such as chemoresistive, microcalorimeteric and Pd/polymer gate FET sensors can be made using this technology. Full numerical analyses including 3D electro- thermo-mechanical simulations, in particular stress and deflection studies on the SOI membranes are presented. The transducer circuit design and the post-CMOS fabrication process, which includes single sided back-etching, are also reported.

Paper Details

Date Published: 5 April 2001
PDF: 10 pages
Proc. SPIE 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, (5 April 2001); doi: 10.1117/12.425340
Show Author Affiliations
Chih-Cheng Lu, Univ. of Cambridge (United Kingdom)
Florin Udrea, Univ. of Cambridge (United Kingdom)
Julian W. Gardner, Univ. of Warwick (United Kingdom)
D. Setiadi, Univ. of Cambridge (United Kingdom)
T. Dogaru, Univ. of Cambridge (United Kingdom)
T. H. Tsai, Univ. of Cambridge (United Kingdom)
James A. Covington, Univ. of Warwick (United Kingdom)

Published in SPIE Proceedings Vol. 4408:
Design, Test, Integration, and Packaging of MEMS/MOEMS 2001
Bernard Courtois; Jean Michel Karam; Steven Peter Levitan; Karen W. Markus; Andrew A. O. Tay; James A. Walker, Editor(s)

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