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Proceedings Paper

Design and test of new high-Q microresonators fabricated by UV-LIGA
Author(s): Skandar Basrour; H. Majjad; Jean-Rene Coudevylle; Michel de Labachelerie
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Paper Abstract

We report in this paper the study of a new metallic microresonator realized by UV-LIGA technique. This kind of device is excited electrostatically and takes advantage of the contour modes or Lame-modes of the structure. Design methods of such device are presented and simulated with a Finite Element Program. Details on the microfabrication process are also presented. The vibration modes are detected with an optical bench set-up and preliminary electrical results are presented. A comparison between experiments and numerical predictions are finally discussed.

Paper Details

Date Published: 5 April 2001
PDF: 7 pages
Proc. SPIE 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, (5 April 2001); doi: 10.1117/12.425337
Show Author Affiliations
Skandar Basrour, LPMO/CNRS (France)
H. Majjad, LPMO/CNRS (France)
Jean-Rene Coudevylle, LPMO/CNRS (France)
Michel de Labachelerie, LPMO/CNRS (France)

Published in SPIE Proceedings Vol. 4408:
Design, Test, Integration, and Packaging of MEMS/MOEMS 2001
Bernard Courtois; Jean Michel Karam; Steven Peter Levitan; Karen W. Markus; Andrew A. O. Tay; James A. Walker, Editor(s)

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