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Proceedings Paper

SPICE modeling of liquid capacitance in micromachined silicon capillaries
Author(s): Paul V. Rainey; S. J. Neil Mitchell; Harold S. Gamble
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Paper Abstract

This paper investigates modeling of the conductance of liquid in a microchannel, using SPICE. When more than one liquid is present, conductance monitoring is an effective technique to measure electroosmotic flow rates. In micromachined silicon capillaries, the technique is hampered by the capacitance that exists between the bulk fluid and the silicon substrate, and leakage currents due to the thin insulating oxide layer. A SPICE model is used to simulate conductance waveforms, by using MOS transistors to model the time dependant resistance of the channel. The simulation results are used to determine the capacitance and explain the conductance waveforms measured for micromachined silicon channels.

Paper Details

Date Published: 30 April 2001
PDF: 7 pages
Proc. SPIE 4407, MEMS Design, Fabrication, Characterization, and Packaging, (30 April 2001); doi: 10.1117/12.425334
Show Author Affiliations
Paul V. Rainey, Queen's Univ. of Belfast (United Kingdom)
S. J. Neil Mitchell, Queen's Univ. of Belfast (United Kingdom)
Harold S. Gamble, Queen's Univ. of Belfast (United Kingdom)


Published in SPIE Proceedings Vol. 4407:
MEMS Design, Fabrication, Characterization, and Packaging
Uwe F. W. Behringer; Deepak G. Uttamchandani, Editor(s)

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