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Proceedings Paper

Development of a laser micromachining toolbox and its application to the production of 3D microstructures
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Paper Abstract

As laser micromachining has developed in recent years, there has emerged a need for the simplification of the process to produce MEMS structures where the stages of manufacture do not require an in-depth knowledge of laser micromachining techniques. This paper describes the initial stages of such an approach - the laser micromachining 'toolbox' - which enable the optimum machining choices to be made from various design requirements. Some of the elements of the toolbox are introduced and quantified in the particular case of excimer laser micromachining. These features are then used to produce a 3D microstructure to demonstrate the capabilities of this approach. Future developments in this area are discussed.

Paper Details

Date Published: 30 April 2001
PDF: 8 pages
Proc. SPIE 4407, MEMS Design, Fabrication, Characterization, and Packaging, (30 April 2001); doi: 10.1117/12.425325
Show Author Affiliations
Jako Greuters, Exitech Ltd. (United Kingdom)
Nadeem Hasan Rizvi, Exitech Ltd. (United Kingdom)


Published in SPIE Proceedings Vol. 4407:
MEMS Design, Fabrication, Characterization, and Packaging
Uwe F. W. Behringer; Deepak G. Uttamchandani, Editor(s)

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