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Proceedings Paper

Operation cycle modeling for electrostatic-type microrelay
Author(s): Georgy I. Efremov; Nikolay Ivanovich Mukhurov
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Paper Abstract

Micro-switching devices, in particular, micro-relays occupy a prominent place in the family of MEMS/MOEMS devices. Such devices offer an advantage of insignificant power consumption and good compliance with requirements of integrated microelectronics technology. This paper presents theoretical analysis of the micro-relay operation cycle as a basic process for designing various miniature threshold devices. It is known that operation of electrostatic micro-relays is the result of interaction of active electrostatic forces arising between control circuit electrodes and reactive mechanical forces created by elastic holders of a movable electrode.

Paper Details

Date Published: 30 April 2001
PDF: 5 pages
Proc. SPIE 4407, MEMS Design, Fabrication, Characterization, and Packaging, (30 April 2001); doi: 10.1117/12.425317
Show Author Affiliations
Georgy I. Efremov, Institute of Electronics (Belarus)
Nikolay Ivanovich Mukhurov, Institute of Electronics (Belarus)

Published in SPIE Proceedings Vol. 4407:
MEMS Design, Fabrication, Characterization, and Packaging
Uwe F. W. Behringer; Deepak G. Uttamchandani, Editor(s)

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