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Proceedings Paper

MEMS technologies for rf communications
Author(s): Qun Wu; B. K. Kim
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Paper Abstract

Microelectromechanical system (MEMS) represents an exciting new technology derived from the same fabricating processes used to make integrated circuits. The trends of growing importance of the wireless communications market is toward the system with minimal size, cost and power consumption. For the purpose of MEMS R&D used for wireless communications, a history and present situation of MEMS device development are reviewed in this paper, and an overview of MEMS research topics on RF communication applications and the state of the art technologies are also presented here.

Paper Details

Date Published: 30 April 2001
PDF: 8 pages
Proc. SPIE 4407, MEMS Design, Fabrication, Characterization, and Packaging, (30 April 2001); doi: 10.1117/12.425311
Show Author Affiliations
Qun Wu, Harbin Institute of Technology (China)
B. K. Kim, Pohang Univ. of Science and Technology (South Korea)

Published in SPIE Proceedings Vol. 4407:
MEMS Design, Fabrication, Characterization, and Packaging
Uwe F. W. Behringer; Deepak G. Uttamchandani, Editor(s)

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