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Proceedings Paper

Infrastructure needs for RF MEMS production
Author(s): Henne van Heeren
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Paper Abstract

RF MEMS activities until now has been driven by universities. For production of these enabling components a new industry is needed. RF MEMS processing is very different and even incompatible with traditional IC processing for at least two reasons: (1) the metals used are unfamiliar and often forbidden in semiconductor processing, (2) making free standing structures needs a specialist knowledge of the properties and the processing of these metals. Even for experienced MEMS institutes/companies making these products is a challenge, and as a result, they can only fulfill the first demands of the customers: i.e. testing of the possibilities of this new technology and proving its feasibility. These first players are generalists, having a broad knowledge of MEMS processes and applications. However, upcoming demand from the market asks different capabilities. Most customers nowadays are not looking for a few `breadboard' samples based on the latest available processes. They need non-technical capabilities like: reproducibility, reliability, timely delivery, etc. Much work has to be done to fit the design demands into the foundries and bring the production processes to a level comparable to mature industries such as semiconductor or magnetic head industries.

Paper Details

Date Published: 30 April 2001
PDF: 6 pages
Proc. SPIE 4407, MEMS Design, Fabrication, Characterization, and Packaging, (30 April 2001); doi: 10.1117/12.425308
Show Author Affiliations
Henne van Heeren, OnStream BV (Netherlands)

Published in SPIE Proceedings Vol. 4407:
MEMS Design, Fabrication, Characterization, and Packaging
Uwe F. W. Behringer; Deepak G. Uttamchandani, Editor(s)

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