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Proceedings Paper

New actuation structure for the deformation of continuous mirrors for adaptive optics
Author(s): Emmanuel Quevy; Lionel Buchaillot; Dominique Collard
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Paper Abstract

This work demonstrates a novel technique for the realization and the actuation of continuous-membrane for adaptive optic applications. This original device exhibits, for the first time, both positive and negative membrane deflection with individual pixel displacement of +/- 10 micrometers , which is one order of magnitude larger than usual approaches, without diffractive interference.

Paper Details

Date Published: 30 April 2001
PDF: 9 pages
Proc. SPIE 4407, MEMS Design, Fabrication, Characterization, and Packaging, (30 April 2001); doi: 10.1117/12.425306
Show Author Affiliations
Emmanuel Quevy, IEMN/CNRS (France)
Lionel Buchaillot, IEMN/CNRS (Japan)
Dominique Collard, IEMN/CNRS and Univ. of Tokyo (France)

Published in SPIE Proceedings Vol. 4407:
MEMS Design, Fabrication, Characterization, and Packaging
Uwe F. W. Behringer; Deepak G. Uttamchandani, Editor(s)

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