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Proceedings Paper

Bio/chemical microsystem designed for wafer scale testing
Author(s): Anders M. Jorgensen; Klaus B. Mogensen; Weimin Rong; Pieter Telleman; Joerg P. Kutter
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Paper Abstract

We have designed a bio/chemical microsystem for online monitoring of glucose concentrations during fermentation. The system contains several passive microfluidic components including an enzyme reactor, a flow lamination part and a detector. Detection is based on the reaction of hydrogen peroxide, that is produced from glucose in an enzyme reactor, with luminol. This chemiluminescent reaction generates light that is detected by an integrated back-side contacted photodiode array. Various tests during fabrication are outlined with the emphasis on microwave detected photo conductance decay. The presented microsystem has both fluidic and electrical connection points accessible from the backside. This allows simultaneous testing of both fluidic and electrical parts before dicing the wafer.

Paper Details

Date Published: 30 April 2001
PDF: 8 pages
Proc. SPIE 4407, MEMS Design, Fabrication, Characterization, and Packaging, (30 April 2001); doi: 10.1117/12.425298
Show Author Affiliations
Anders M. Jorgensen, Danmarks Tekniske Univ. (United States)
Klaus B. Mogensen, Danmarks Tekniske Univ. (Denmark)
Weimin Rong, Danmarks Tekniske Univ. (Denmark)
Pieter Telleman, Danmarks Tekniske Univ. (Denmark)
Joerg P. Kutter, Danmarks Tekniske Univ. (Denmark)

Published in SPIE Proceedings Vol. 4407:
MEMS Design, Fabrication, Characterization, and Packaging
Uwe F. W. Behringer; Deepak G. Uttamchandani, Editor(s)

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