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Proceedings Paper

Novel equipment for friction force measurement on MEMS and microcomponents
Author(s): Martin Schmidt; Andreas Wortmann; Holger Luethje; Stephanus Buettgenbach
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Paper Abstract

The importance of micro actuators will increase dramatically in the near future. Micro actuators are only capable of generating low forces, therefore surfaces in dynamic contact must be tribologically optimized. Since component and thin film properties may differ from their bulk material behavior and in order to investigate the influence of the components' geometries, it is important to investigate the effect of friction in micro actuators under comparable test conditions. To enable such in-situ investigations two testing units have been designed and built up at the IMT and IST. We report on the design of these devices.

Paper Details

Date Published: 30 April 2001
PDF: 6 pages
Proc. SPIE 4407, MEMS Design, Fabrication, Characterization, and Packaging, (30 April 2001); doi: 10.1117/12.425297
Show Author Affiliations
Martin Schmidt, Technical Univ. of Braunschweig (Germany)
Andreas Wortmann, Fraunhofer Institute for Surface Engineering and Thin Films (Germany)
Holger Luethje, Fraunhofer Institute for Surface Engineering and Thin Films (Germany)
Stephanus Buettgenbach, Technical Univ. of Braunschweig (Germany)

Published in SPIE Proceedings Vol. 4407:
MEMS Design, Fabrication, Characterization, and Packaging
Uwe F. W. Behringer; Deepak G. Uttamchandani, Editor(s)

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