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Proceedings Paper

Micro stereo lithography for fabrication of 3D polymeric and ceramic MEMS
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Paper Abstract

In this paper, the applications of Micro Stereo Lithography for polymer and ceramic based microstructures and MEMS are discussed with some examples.

Paper Details

Date Published: 30 April 2001
PDF: 11 pages
Proc. SPIE 4407, MEMS Design, Fabrication, Characterization, and Packaging, (30 April 2001); doi: 10.1117/12.425296
Show Author Affiliations
Vijay K. Varadan, The Pennsylvania State Univ. (United States)
Vasundara V. Varadan, The Pennsylvania State Univ. (United States)


Published in SPIE Proceedings Vol. 4407:
MEMS Design, Fabrication, Characterization, and Packaging
Uwe F. W. Behringer; Deepak G. Uttamchandani, Editor(s)

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