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Proceedings Paper

Model library and tool support for MEMS simulation
Author(s): Peter Schwarz; Peter Schneider
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Paper Abstract

FEM simulation is often a very time-consuming process in the design optimization of complex MEMS. System-level models with reduced order and accuracy have to be generated as a basis of a multi-domain system simulation. A powerful modelling methodology is needed to develop a library of MEMS models for different physical domains (mechanical, magnetic, fluidic, ...). The components are modelled as multi-terminal elements (multipoles) in generalized KIRCHHOFFian networks and are described with VHDL-AMS or other model description languages. Numerical model generation and parameterization is supported by a tool suite. Simulator coupling offers an additional possibility for analyzing heterogeneous MEMS.

Paper Details

Date Published: 30 April 2001
PDF: 14 pages
Proc. SPIE 4407, MEMS Design, Fabrication, Characterization, and Packaging, (30 April 2001); doi: 10.1117/12.425295
Show Author Affiliations
Peter Schwarz, Fraunhofer Institute for Integrated Circuits (Germany)
Peter Schneider, Fraunhofer Institute for Integrated Circuits (Germany)


Published in SPIE Proceedings Vol. 4407:
MEMS Design, Fabrication, Characterization, and Packaging
Uwe F. W. Behringer; Deepak G. Uttamchandani, Editor(s)

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