Share Email Print
cover

Proceedings Paper

Web-based procedure to speed up reaction to in-line inspection alarms
Author(s): Rosa Fernandez Castro; Alfonso Lorenzo; Fernando Urgel; Carlos Mata
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

An important point in the in-line yield improvement strategy is to be able to react as soon as possible to the alarms detected, and stop the excursions quickly in order to reduce the impact in yield loss and reliability. Therefore, to improve these requirements, we have developed a procedure, using web-based tools, which we detail in this paper. This exchange of information system permits the operators to easily access the engineer's documents. The engineering expertise about the usual problems is concentrated in these documents, which clearly explains the procedures to follow. Using a web interface, operators can complete all necessary data to continue with the investigation through different shifts. This database is easily accessible by engineers and other operators and the information is structured and organized in a uniform and correct way. In this paper we will show the benefits that we have found during the last six months working in production with this procedure.

Paper Details

Date Published: 23 April 2001
PDF: 12 pages
Proc. SPIE 4406, In-Line Characterization, Yield, Reliability, and Failure Analysis in Microelectronic Manufacturing II, (23 April 2001); doi: 10.1117/12.425273
Show Author Affiliations
Rosa Fernandez Castro, Agere Systems (Spain)
Alfonso Lorenzo, Agere Systems (Spain)
Fernando Urgel, Agere Systems (Spain)
Carlos Mata, Agere Systems (Spain)


Published in SPIE Proceedings Vol. 4406:
In-Line Characterization, Yield, Reliability, and Failure Analysis in Microelectronic Manufacturing II
Gudrun Kissinger; Larg H. Weiland, Editor(s)

© SPIE. Terms of Use
Back to Top