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Proceedings Paper

Fabrication of fluidic manifold systems using single-exposure grayscale masks
Author(s): Christopher J. Hayden; Julian P.H. Burt
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Paper Abstract

Lab-on-a-chip devices are currently being developed at the University of Wales, Bangor. These devices can be used to manipulate and characterize bio-particles suspended in a fluid medium . For precise operation, accurate fluidic transport within these devices is required, for example at channel junctions where flow rates or mixing must be controlled. We present a technique for the production of varying cross-section channels and fluidic manifolds by photolithographic exposure of greyscale masks. This technique is ideally suited to the rapid prototyping and production of lab-on-a-chip devices, since a single exposure system is both faster and simpler than other methods currently available.

Paper Details

Date Published: 26 April 2001
PDF: 7 pages
Proc. SPIE 4404, Lithography for Semiconductor Manufacturing II, (26 April 2001); doi: 10.1117/12.425210
Show Author Affiliations
Christopher J. Hayden, Univ. of Wales Bangor (United Kingdom)
Julian P.H. Burt, Univ. of Wales Bangor (United Kingdom)


Published in SPIE Proceedings Vol. 4404:
Lithography for Semiconductor Manufacturing II
Chris A. Mack; Tom Stevenson, Editor(s)

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