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Proceedings Paper

Problems of PLD hybrid technique for CNx films creation
Author(s): Miroslav Jelinek
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Paper Abstract

Highly nitrogenated CNx films were created by pulsed laser deposition (PLD), combined with radiofrequency (RF) and hollow cathode (HC) discharges. The RF discharge was held between two electrodes situated parallel to plasma plume from a graphite target. In PLD combined with HC discharges an one of the RF electrodes was used to supply nitrogen on the substrate. The N/C ratio higher than 1 was measured. Deposition set-up and its various modifications and an accuracy of composition measurement of CNx layers by WDX and RBS methods are discussed.

Paper Details

Date Published: 9 April 2001
PDF: 5 pages
Proc. SPIE 4397, 11th International School on Quantum Electronics: Laser Physics and Applications, (9 April 2001); doi: 10.1117/12.425149
Show Author Affiliations
Miroslav Jelinek, Institute of Physics (Czech Republic)


Published in SPIE Proceedings Vol. 4397:
11th International School on Quantum Electronics: Laser Physics and Applications

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