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Proceedings Paper

Laser-induced damage of fluoride coatings for UV lasers
Author(s): K. Yoshida; M. Ohya; K. Yagi; Toshimasa Matsuoka; Kanyoshi Ochi; M. Sunagawa; Tomosumi Kamimura
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Paper Abstract

UV and DUV lasers are very important for many applications such as micro-machining, new material creation, medical care, and photo-lithography. Laser-induced damage of thin films coated on optical components used for UV and DUV lasers are serious problem. We have developed a new technique for producing anti- reflection (AR) coating on various substrate materials including fused silica glass and CaF2 crystal. In this technique, porous magnesium fluoride (MgF2) AR coating was developed. The reflectance of the porous AR coating on fused silica substrate was 0.3% at 500 nm.

Paper Details

Date Published: 12 April 2001
PDF: 1 pages
Proc. SPIE 4347, Laser-Induced Damage in Optical Materials: 2000, (12 April 2001); doi: 10.1117/12.425066
Show Author Affiliations
K. Yoshida, Osaka Institute of Technology (Japan)
M. Ohya, Osaka Institute of Technology (Japan)
K. Yagi, Osaka Institute of Technology (Japan)
Toshimasa Matsuoka, Osaka Institute of Technology (Japan)
Kanyoshi Ochi, Osaka Institute of Technology (Japan)
M. Sunagawa, S Vac Co. (Japan)
Tomosumi Kamimura, Osaka Univ. (Japan)


Published in SPIE Proceedings Vol. 4347:
Laser-Induced Damage in Optical Materials: 2000
Gregory J. Exarhos; Arthur H. Guenther; Mark R. Kozlowski; Keith L. Lewis; M. J. Soileau, Editor(s)

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