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Proceedings Paper

Optical thin films grown by surface chemical reaction for high-power lasers
Author(s): Shin-ichi Zaitsu; Shinji Motokoshi; Takahisa Jitsuno; Masahiro Nakatsuka; Tatsuhiko Yamanaka
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Paper Abstract

We developed a novel coating method using chemical reactions of gaseous reactants on a surface. A self-limiting nature of surface chemical reactions allows precisely controlled growth of films with high uniformity and controllability of thickness over large area. The nonuniformity of thickness distribution was under 1% over 240 mm in diameter. The film thickness had proportional relationship with a number of chemical reactions. TiO2 films at growth temperature of 25 degree(s)C had a laser-induced damage threshold of 5 J/cm2 for 1-ns, 1.06-micrometers laser pulses. The laser damage resistance of TiO2 films decreased at higher growth temperature. TiO2 films grown at the high temperature had higher crystallinity. We clarified that the laser damages resulted from the local sites that absorbed the laser energy.

Paper Details

Date Published: 12 April 2001
PDF: 6 pages
Proc. SPIE 4347, Laser-Induced Damage in Optical Materials: 2000, (12 April 2001); doi: 10.1117/12.425045
Show Author Affiliations
Shin-ichi Zaitsu, Osaka Univ. (Japan)
Shinji Motokoshi, Institute for Laser Technology (Japan)
Takahisa Jitsuno, Osaka Univ. (Japan)
Masahiro Nakatsuka, Osaka Univ. (Japan)
Tatsuhiko Yamanaka, Osaka Univ. (Japan)


Published in SPIE Proceedings Vol. 4347:
Laser-Induced Damage in Optical Materials: 2000
Gregory J. Exarhos; Arthur H. Guenther; Mark R. Kozlowski; Keith L. Lewis; M. J. Soileau, Editor(s)

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