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Proceedings Paper

Long-time radiation-resistant optical coatings for UV excimer laser applications
Author(s): Sven Laux; Helmut Bernitzki; Michael Klaus; Hans Lauth; Norbert Kaiser
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Paper Abstract

An example of a multilayer component for 248-nm excimer laser applications is explained in this contribution. By means of a polarizing beam splitter the potential of plasma- assisted deposition is shown. Such a coating shows a high reflecting and a high transmitting function for different polarization at a certain angle of incidence. High reflection requires a considerable number of layer pairs with a large total optical film thickness. Despite large film thickness, the optical absorption can be minimized and high transmission can be obtained. The laser induced damage threshold of such a coating is in the order of 2.5 J/cm2 for single shot measurements at 20 ns pulse length. The life time is greater than 5X109 shots at a fluence of 10mJ/cm2. Very stable deposition conditions must be maintained to produce these coatings within small tolerance of the optical function. It was found that plasma-assisted deposition is a more reliable technology for producing these coatings compared to classical evaporation.

Paper Details

Date Published: 12 April 2001
PDF: 4 pages
Proc. SPIE 4347, Laser-Induced Damage in Optical Materials: 2000, (12 April 2001); doi: 10.1117/12.425034
Show Author Affiliations
Sven Laux, JENOPTIK Laser, Optik, Systeme GmbH (Germany)
Helmut Bernitzki, JENOPTIK Laser, Optik, Systeme GmbH (Germany)
Michael Klaus, JENOPTIK Laser, Optik, Systeme GmbH (Germany)
Hans Lauth, JENOPTIK Laser, Optik, Systeme GmbH (Germany)
Norbert Kaiser, Fraunhofer-Institut fuer Angewandte Optik und Feinmechanik (Germany)

Published in SPIE Proceedings Vol. 4347:
Laser-Induced Damage in Optical Materials: 2000
Gregory J. Exarhos; Arthur H. Guenther; Mark R. Kozlowski; Keith L. Lewis; M. J. Soileau, Editor(s)

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