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Proceedings Paper

Interfacial absorption of DUV coatings
Author(s): Oliver Apel; Michael Schulz-Grosser; Uwe Leinhos; Michael Kennedy; Klaus R. Mann; Rainer G. Schuhmann
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Paper Abstract

Complicated dielectric coatings consist of a large number of layers and thus have many interfaces, that may contribute to the total absorption of the coatings. We examined this contribution of the interfaces using two different approaches. For the determination of the absorption of the first interface between the substrate and the coatings we varied the thickness of dielectric single layers. For the examination of the influence of the interfaces within a dielectric stack, coatings consisting of (lambda) /2-layers were produced and their absorption was measured.

Paper Details

Date Published: 12 April 2001
PDF: 7 pages
Proc. SPIE 4347, Laser-Induced Damage in Optical Materials: 2000, (12 April 2001); doi: 10.1117/12.425030
Show Author Affiliations
Oliver Apel, Laser-Lab. Goettingen eV (Germany)
Michael Schulz-Grosser, LINOS Photonics GmbH (Germany)
Uwe Leinhos, Laser-Lab. Goettingen eV (Germany)
Michael Kennedy, LINOS Photonics GmbH (Germany)
Klaus R. Mann, Laser-Lab. Goettingen eV (Germany)
Rainer G. Schuhmann, LINOS Photonics GmbH (Germany)

Published in SPIE Proceedings Vol. 4347:
Laser-Induced Damage in Optical Materials: 2000
Gregory J. Exarhos; Arthur H. Guenther; Mark R. Kozlowski; Keith L. Lewis; M. J. Soileau, Editor(s)

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