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Proceedings Paper

1-J and 300-W excimer laser with exceptional pulse stability for poly-Si crystallization
Author(s): Michael Fiebig; Uwe Stamm; Peter Oesterlin; Naoyuki Kobayashi; Burkhard Fechner
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Paper Abstract

Liquid-crystal displays (LCDs) especially active-matrix LCDs are conquering the display market. The market has forced a continuous process development to fulfill all of the demands from the various fields like car navigation systems, multi- media applications, laptop computers or PC displays. The LCD manufacturers face a constant challenge to produce higher performance display at lower costs. Therefore, they are looking for the most cost effective and best production technique.

Paper Details

Date Published: 30 April 2001
PDF: 3 pages
Proc. SPIE 4295, Flat Panel Display Technology and Display Metrology II, (30 April 2001); doi: 10.1117/12.424885
Show Author Affiliations
Michael Fiebig, Lambda Physik AG (Germany)
Uwe Stamm, Lambda Physik AG (Germany)
Peter Oesterlin, MicroLas Lasersystem GmbH (Germany)
Naoyuki Kobayashi, Japan Steel Works, Ltd. (Japan)
Burkhard Fechner, Lambda Physik Japan Co., Ltd. (Japan)


Published in SPIE Proceedings Vol. 4295:
Flat Panel Display Technology and Display Metrology II
Edward F. Kelley; Edward F. Kelley; Apostolos T. Voutsas, Editor(s)

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