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Proceedings Paper

Reliability of polysilicon thin film transistors on stainless steel foil substrates
Author(s): Themis Afentakis; Miltiadis K. Hatalis
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Paper Abstract

We have successfully fabricated polysilicon thin film transistors on a flexible stainless steel foil substrate. Both - and p-channel devices have been subjected to DC and AC voltage stressing, in order to provide for a basic measurement of their performance. We have compared these characteristics with results obtained from devices we have previously fabricated on quartz substrates, and have found no evidence that the stainless steel substrate has affected the reliability of the transistors. We therefore believe that polysilicon devices and circuits on steel present an attractive alternative to transistors fabricated on more expensive substrates, without any reliability compromise.

Paper Details

Date Published: 30 April 2001
PDF: 5 pages
Proc. SPIE 4295, Flat Panel Display Technology and Display Metrology II, (30 April 2001); doi: 10.1117/12.424863
Show Author Affiliations
Themis Afentakis, Lehigh Univ. (United States)
Miltiadis K. Hatalis, Lehigh Univ. (United States)


Published in SPIE Proceedings Vol. 4295:
Flat Panel Display Technology and Display Metrology II
Edward F. Kelley; Edward F. Kelley; Apostolos T. Voutsas, Editor(s)

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