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Proceedings Paper

Erbium-activated silica-titania planar waveguides prepared by rf-sputtering
Author(s): Sabina Ronchin; Alessandro Chiasera; Maurizio Montagna; Raffaella Rolli; Cristiana Tosello; Stefano Pelli; Giancarlo C. Righini; Rogeria Rocha Goncalves; Sidney J. L. Ribeiro; Carlo S. De Bernardi; Fabio Pozzi; Claire Duverger; Romina Belli; Maurizio Ferrari
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Paper Abstract

Erbium-activated silica-titania planar waveguides were prepared by rf-sputtering technique. The films were deposited both on v-SiO2 and silica-on-silica substrates obtained by plasma-enhanced chemical vapor deposition. The refractive index, the thickness and the total attenuation coefficient of the waveguides were measured by prism coupling technique. Scanning electron microscopy was used to analyze the morphology of both substrates and waveguiding film. Energy Dispersive Spectroscopy was performed in order to obtain a compositional analysis. Roughness measurements were carried out by means of a stylus profilometer. After thermal annealing at 600 degrees C for 6 hours the waveguides exhibited several well confined TE and TM propagating modes at 633 nm and one mode at 1550 nm. The attenuation coefficient at 1550 nm was 0.9 and 0.7 dB/cm for the films deposited on silica-on-silicon waveguide Raman spectroscopy. Waveguide luminescence spectroscopy was used to study the 4I13/2 yields 4I15/2 transition of Er3+ ion. The emission at 1530 nm was observed at room temperature upon continuous wave excitation at 514.2 nm. A lifetime of 3.7 ms for the metastable 4I13/2 level was measured.

Paper Details

Date Published: 27 April 2001
PDF: 9 pages
Proc. SPIE 4282, Rare-Earth-Doped Materials and Devices V, (27 April 2001); doi: 10.1117/12.424788
Show Author Affiliations
Sabina Ronchin, Univ. degli Studi di Trento (Italy)
Alessandro Chiasera, Univ. degli Studi di Trento (Italy)
Maurizio Montagna, Univ. degli Studi di Trento (Italy)
Raffaella Rolli, Univ. degli Studi di Trento (Italy)
Cristiana Tosello, Univ. degli Studi di Trento (Italy)
Stefano Pelli, Istituto di Ricerca sulle Onde Elettromagnetiche (Italy)
Giancarlo C. Righini, Istituto di Ricerca sulle Onde Elettromagnetiche (Italy)
Rogeria Rocha Goncalves, Univ. Estadual Paulista (Italy)
Sidney J. L. Ribeiro, Univ. Estadual Paulista (Brazil)
Carlo S. De Bernardi, Agilent Technologies Torino Technology Ctr. (Italy)
Fabio Pozzi, Agilent Technologies Torino Technology Ctr. (Italy)
Claire Duverger, Univ. du Maine (France)
Romina Belli, Univ. degli Studi di Trento (Italy)
Maurizio Ferrari, Ctr. de Fisica degli Stati Aggregati (Italy)


Published in SPIE Proceedings Vol. 4282:
Rare-Earth-Doped Materials and Devices V
Shibin Jiang, Editor(s)

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