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Proceedings Paper

Temperture-gradient and composition-spread deposition of epitaxial oxide films and high-throughput characterization
Author(s): Tomoteru Fukumura; M. Ohtani; J. Nishimura; T. Kageyama; Takashi Koida; Mikk Lippmaa; Masashi Kawasaki; Tetsuya Hasegawa; Hideomi Koinuma
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Paper Abstract

We have developed a laser molecular beam epitaxy system capable of the temperature-gradient and/or composition-spread integration of thin films in a substrate. The latter is achieved by using a moving mask system synchronizing with target exchange and laser pulse. The former employs a substrate holder having a controlled asymmetric thermal conduction heated by a focused Nd:YAG continuous wave laser beam. A concurrent x-ray diffractometer can immediately characterize the dependences of the lattice constant and crystalline quality on the film growth temperature and composition. The temperature-gradient method is very useful for revealing an optimum substrate temperature for epitaxial thin film growth. Several other characterization techniques such as magnetic field microscope and parallel transport measurement system developed for characterizing composition-spread thin films are presented.

Paper Details

Date Published: 23 April 2001
PDF: 10 pages
Proc. SPIE 4281, Combinatorial and Composition Spread Techniques in Materials and Device Development II, (23 April 2001); doi: 10.1117/12.424755
Show Author Affiliations
Tomoteru Fukumura, Tokyo Institute of Technology (Japan)
M. Ohtani, Tokyo Institute of Technology (Japan)
J. Nishimura, Tokyo Institute of Technology (Japan)
T. Kageyama, Tokyo Institute of Technology (Japan)
Takashi Koida, Tokyo Institute of Technology (Japan)
Mikk Lippmaa, Tokyo Institute of Technology and National Institute for Research in Inorganic Materials (Japan)
Masashi Kawasaki, Tokyo Institute of Technology and National Institute for Research in Inorganic Materials (Japan)
Tetsuya Hasegawa, Tokyo Institute of Technology and National Institute for Research in Inorganic Materials (Japan)
Hideomi Koinuma, Tokyo Institute of Technology, National Institute for Research in Inorganic Materials, and (Japan)


Published in SPIE Proceedings Vol. 4281:
Combinatorial and Composition Spread Techniques in Materials and Device Development II
Ghassan E. Jabbour; Hideomi Koinuma, Editor(s)

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