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Proceedings Paper

Combinatorial approach for ferroelectric thin film using solution-based process
Author(s): Hiroshi Funakubo; Gan He; Takashi Iijima
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Paper Abstract

Possibility of combinatorial approach to discover a new composition with novel property is discussed mainly focused on the ferroelectric materials. Sol-gel based process has an advantage of easy change of composition to discover a new material with good ferroelectricity and piezoelectric property. Pb(Zr,Ti)O3 with different Zr/(Zr+Ti) composition was successfully prepared by using two methods. One is the mixing at solution state from Pb-Ti and Pb-Zr solutions. The other is the mixing by making Pb-Ti (PT) and Pb-Zr (PZ) solid state layers and the following heat treatment. Mixing at solution state is useful to get a film with a good quality in a shorter time. As a result, sol-gel based process is ascertained to be very effective because of its possibility of making large number of pixels with different composition in a shorter time.

Paper Details

Date Published: 23 April 2001
PDF: 10 pages
Proc. SPIE 4281, Combinatorial and Composition Spread Techniques in Materials and Device Development II, (23 April 2001); doi: 10.1117/12.424748
Show Author Affiliations
Hiroshi Funakubo, Tokyo Institute of Technology (Japan)
Gan He, Tohoku National Industrial Research Institute (Japan)
Takashi Iijima, Tohoku National Industrial Research Institute (Japan)


Published in SPIE Proceedings Vol. 4281:
Combinatorial and Composition Spread Techniques in Materials and Device Development II
Ghassan E. Jabbour; Hideomi Koinuma, Editor(s)

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