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Proceedings Paper

Pyroelectric properties of sol-gel-derived (Pb,Mg)TiO3 thin film detectors
Author(s): Ying-Chung Chen; Chih-Ming Wang; Ming-Cheng Kao; Yun-Hsing Lai
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Paper Abstract

High-performance pyroelectric infrared (IR) detectors have been fabricated without the back side etching process using Mg-modified lead titanate (Pb1-xMgxTiO3) thin films. PMT thin films were deposited on (111)-oriented Pt thin film on SiO2/Si(100) substrates by a diol-based sol-gel process. The randomly oriented PMT thin film exhibits a relatively small dielectric constant and a large pyroelectric coefficient without poling treatment. The pyroelectric characteristics of point detector with various Mg contents as a function of modulation frequency are compared. It was found that the PMT(6) thin film detector has a large voltage responsivity of 5280 (V/W) at 20 Hz. The specific detectivity (D*) at 100 Hz is 5.12 X 107 cmHz1/2/W. The results showed that Pb1-xMgxTiO3 thin film with x equals 0.06 [PMT(6)] was most suitable for use as a pyroelectric IR detector.

Paper Details

Date Published: 6 April 2001
PDF: 7 pages
Proc. SPIE 4234, Smart Materials, (6 April 2001); doi: 10.1117/12.424422
Show Author Affiliations
Ying-Chung Chen, National Sun Yat-Sen Univ. (Taiwan)
Chih-Ming Wang, Cheng-Shiu Institute of Technology (Taiwan)
Ming-Cheng Kao, National Sun Yat-Sen Univ. (Taiwan)
Yun-Hsing Lai, National Sun Yat-Sen Univ. (Taiwan)

Published in SPIE Proceedings Vol. 4234:
Smart Materials
Alan R. Wilson; Hiroshi Asanuma, Editor(s)

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