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Proceedings Paper

Fabricating pre-assembled microoptical systems with deep x-ray lithography
Author(s): William C. Sweatt; Todd R. Christenson
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Paper Details

Date Published:
Proc. SPIE SW103, Integrated Optics and Micro Optics, ; doi: 10.1117/12.423827
Show Author Affiliations
William C. Sweatt, Sandia National Labs. (United States)
Todd R. Christenson, Sandia National Labs. (United States)

Published in SPIE Proceedings Vol. SW103:
Integrated Optics and Micro Optics
Yakov S. Sidorin, Editor(s)

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