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Proceedings Paper

Emissivity-corrected infrared thermal pulse measurement on microscopic semiconductor targets
Author(s): Grant C. Albright; James A. Stump; Chunpang Li; Herbert Kaplan
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Paper Abstract

The precision measurement and recording of high speed thermal transients on microscopic targets is critical to the manufacturing of semiconductors and other electronic devices as thermal budgets become over more demanding and devices become more compact and powerful. This paper describes the fully automated emissivity- corrected measurement of high speed thermal pulses at speeds up to 200 KHz representing the newest innovation in almost 25 years of thermal microimager evolution. Sample thermal images and time-based thermal scans are presented demonstrating the use of this transient measurement capability in the detection and identification of design and process defects. The documentation of a measurement spatial resolution of better than 3 micrometers is also reviewed.

Paper Details

Date Published: 23 March 2001
PDF: 9 pages
Proc. SPIE 4360, Thermosense XXIII, (23 March 2001); doi: 10.1117/12.420983
Show Author Affiliations
Grant C. Albright, Quantum Focus Instruments Corp. (United States)
James A. Stump, Quantum Focus Instruments Corp. (United States)
Chunpang Li, Quantum Focus Instruments Corp. (United States)
Herbert Kaplan, Honeyhill Technical Co. (United States)

Published in SPIE Proceedings Vol. 4360:
Thermosense XXIII
Andres E. Rozlosnik; Ralph B. Dinwiddie, Editor(s)

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