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Proceedings Paper

Theoretical backgrounds of methods of angle-resolved and total integral scattering for precise dielectric surfaces
Author(s): K. Malitsky
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Paper Abstract

Theoretical models of light scattering methods are considered for precise dielectric surfaces. By use of microscopic treatment it is shown, that polarization of near-surface medium in the presence of roughness differs from that in the volume of medium. Simple theoretical model of near-surface polarization dependence due to effective field difference is presented for the case of s-polarized incident light. Corresponding light scattering is calculated by use of quasi-microscopic approach. It is shown that the intensity of scattering decreases noticeably for very smooth surfaces, which height deviations are compared with interatomic distance (approximately 5 A for SiO2). Therefore the differences of power spectral density functions measured by angle-resolved scattering and atomic force microscopy methods may be qualitatively explained.

Paper Details

Date Published: 23 March 2001
PDF: 9 pages
Proc. SPIE 4350, Laser Optics 2000: Solid State Lasers, (23 March 2001); doi: 10.1117/12.420968
Show Author Affiliations
K. Malitsky, Moscow Institute of Physics and Technology (Russia)

Published in SPIE Proceedings Vol. 4350:
Laser Optics 2000: Solid State Lasers
Vladimir I. Ustugov, Editor(s)

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