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Proceedings Paper

Magnetic MEMS used in smart structures which exploit magnetic materials properties
Author(s): Ronald B. Zmood; LiJiang Qin; Dinesh K. Sood; Thurai Vinay; D. Meyrick
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Paper Abstract

Magnetic MEMS technology, by exploiting the special properties of magnetic materials, offers many challenging possibilities for useful device development in the future. In this paper we explore some of the magnetic materials used in MEMS devices, and methods of fabricating them. Some of the key design issues are briefly addressed and applications of this technology to electromagnetic devices developed at RMIT and to thermally controlled magnetic devices, which are of increasing interest, are examined.

Paper Details

Date Published: 21 March 2001
PDF: 15 pages
Proc. SPIE 4235, Smart Structures and Devices, (21 March 2001); doi: 10.1117/12.420856
Show Author Affiliations
Ronald B. Zmood, Royal Melbourne Institute of Technology (Israel)
LiJiang Qin, Royal Melbourne Institute of Technology (Australia)
Dinesh K. Sood, Royal Melbourne Institute of Technology (Australia)
Thurai Vinay, Royal Melbourne Institute of Technology (Australia)
D. Meyrick, Royal Melbourne Institute of Technology (Australia)


Published in SPIE Proceedings Vol. 4235:
Smart Structures and Devices
Dinesh K. Sood; Ronald Albert Lawes; Vasundara V. Varadan, Editor(s)

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