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Proceedings Paper

Cylindrical and conical electrostatic wobble micromotors
Author(s): Tony Sarros; Eng C. Chew; Simon Crase; Boon Kain Tay; Wen L. Soong
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Paper Abstract

This paper describes the analysis, design, construction and testing of two electrostatic wobble micromotors; a conventional cylindrical design and a new conical design. Both designs have stators with eight segments. The cylindrical micromotor rotor is about 4mm in diameter and 20mm long while the conical rotor has a maximum diameter of about 10mm and is 12mm long. The advantage of the new conical design is that it eliminates the need for a pivot and hence substantially reduces the size of the motor. A detailed theoretical analysis of the designs is shown and compared with experimental results. The micromotors are operated under open-loop control and the rotation of the rotor was tested at an applied voltage of up to 500V.

Paper Details

Date Published: 16 March 2001
PDF: 12 pages
Proc. SPIE 4236, Smart Electronics and MEMS II, (16 March 2001); doi: 10.1117/12.418767
Show Author Affiliations
Tony Sarros, Adelaide Univ. (Australia)
Eng C. Chew, Adelaide Univ. (Australia)
Simon Crase, Adelaide Univ. (Australia)
Boon Kain Tay, Adelaide Univ. (Australia)
Wen L. Soong, Adelaide Univ. (Australia)

Published in SPIE Proceedings Vol. 4236:
Smart Electronics and MEMS II
Derek Abbott; Vijay K. Varadan; Karl F. Boehringer, Editor(s)

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