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Proceedings Paper

Two-axis micropositioning system with piezoelectric actuators and digital control
Author(s): Bretislav Mikel; Ondrej Cip; Zdenek Harna
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Paper Abstract

The scanning table, which is controlled by a PZT control system that has been constructed, is presented. It is used for a fine manipulation of a probe in measurement of the profile of the laser beam focused by high NA lens e.g.. The whole system has been calibrated by a two-axis laser interferometer. Where the PZT control system and the interferometer were connected to the CAN network and the actual X-Y position was saved to the PC synchronously with the CAN network time stamps generated by the PZT control system. Precision about 300nm at the positioning system was reached.

Paper Details

Date Published: 7 March 2001
PDF: 6 pages
Proc. SPIE 4356, 12th Czech-Slovak-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics, (7 March 2001); doi: 10.1117/12.417849
Show Author Affiliations
Bretislav Mikel, Institute of Scientific Instruments and Brno Univ. of Technology (Czech Republic)
Ondrej Cip, Institute of Scientific Instruments (Czech Republic)
Zdenek Harna, Brno Univ. of Technology (Czech Republic)


Published in SPIE Proceedings Vol. 4356:
12th Czech-Slovak-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics
Jan Perina; Miroslav Hrabovsky; Jaromir Krepelka, Editor(s)

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