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Proceedings Paper

Application of heterodyne interferometry for the full-field surface shape measurement
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Paper Abstract

The subject of the paper is the presentation of applications of the full-field heterodyne interferometer. The description of the interferometer used is given. The basic relations for the fast CCD Dalsa camera are cited. The sources of the measurement errors are discussed. The result of testing the frequency difference stability of acousto-optic modulators are described.

Paper Details

Date Published: 7 March 2001
PDF: 5 pages
Proc. SPIE 4356, 12th Czech-Slovak-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics, (7 March 2001); doi: 10.1117/12.417825
Show Author Affiliations
Romulad Jozwicki, Warsaw Univ. of Technology (Poland)
Tomasz S. Tkaczyk, Warsaw Univ. of Technology (United States)


Published in SPIE Proceedings Vol. 4356:
12th Czech-Slovak-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics
Jan Perina; Miroslav Hrabovsky; Jaromir Krepelka, Editor(s)

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