Share Email Print
cover

Proceedings Paper

Chemical dissolution of III-V and II-VI semiconductor compounds in solutions of HNO3-HCl-lactic acid system
Author(s): V. N. Tomashik; Z. F. Tomashik; S. G. Danylenko; Ye. O. Bilevych
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

The nature of CdTe, Cd1-XZnXTe solid solutions, InAs and InSb dissolution in the mixture of HNO3-HCl-lactic acid system are investigated. The surfaces of equal etching rates (Gibbs diagrams) are constructed, limiting stages of dissolution process and regions of polishing solutions in this system are determined.

Paper Details

Date Published: 22 February 2001
PDF: 6 pages
Proc. SPIE 4355, Fifth International Conference on Material Science and Material Properties for Infrared Optoelectronics, (22 February 2001); doi: 10.1117/12.417792
Show Author Affiliations
V. N. Tomashik, Institute of Semiconductor Physics (Ukraine)
Z. F. Tomashik, Institute of Semiconductor Physics (Ukraine)
S. G. Danylenko, Institute of Semiconductor Physics (Ukraine)
Ye. O. Bilevych, Institute of Semiconductor Physics (Ukraine)


Published in SPIE Proceedings Vol. 4355:
Fifth International Conference on Material Science and Material Properties for Infrared Optoelectronics
Fiodor F. Sizov, Editor(s)

© SPIE. Terms of Use
Back to Top