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Proceedings Paper

Hybrid and monolithic infrared detector arrays
Author(s): Chris A. Van Hoof; Lars Zimmermann; Joachim John; Piet De Moor; Spyros Kavadias; Martin Gastal; Stefan Nemeth; Gustaaf Borghs; Patrick Merken
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Paper Abstract

Infrared detector arrays can be divided in two distinct classes: hybrid (and typically photon) detectors and monolithic (and generally thermal) detectors. Hybrid detectors involve flip-chip integration of the detector array and the readout chip, require cooling and thus cause substantial system cost. Monolithic detectors do not suffer this system overhead and most notably the microbolometer thermal detectors allow ambient operating temperature. IMEC focuses on III-V (InGaAs, InAs and InAsSb) short-wave and mid-infrared detector arrays for hybrid integration on one side and surface micromachined uncooled polySiGe microbolometer arrays on the other hand. Progress in both types of detector systems is reported.

Paper Details

Date Published: 22 February 2001
PDF: 9 pages
Proc. SPIE 4355, Fifth International Conference on Material Science and Material Properties for Infrared Optoelectronics, (22 February 2001); doi: 10.1117/12.417784
Show Author Affiliations
Chris A. Van Hoof, IMEC (Belgium)
Lars Zimmermann, IMEC (Belgium)
Joachim John, IMEC (Belgium)
Piet De Moor, IMEC (Belgium)
Spyros Kavadias, IMEC (Belgium)
Martin Gastal, IMEC (Belgium)
Stefan Nemeth, IMEC (Belgium)
Gustaaf Borghs, IMEC (Belgium)
Patrick Merken, IMEC and Royal Military Academy (Belgium)


Published in SPIE Proceedings Vol. 4355:
Fifth International Conference on Material Science and Material Properties for Infrared Optoelectronics

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