Share Email Print
cover

Proceedings Paper

New approach for response surface methodology
Author(s): Alexander A. Kouleshoff; Vladislav V. Nelayev
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Modified Response Surface Methodology (MRSM) is proposed for the approximation of numerical simulation results. This approach is based on the parametric statistics methods. The tensor products or Chebyshev's polynomials are used for the non-linear regression series in order to decrease the mean- square error. The MRSM algorithm is realized via MathematicaR package. Results of investigations are proved on the basis of numerical simulation of the integrated circuit technology and analysis of the experimental data for thin film technology.

Paper Details

Date Published: 1 February 2001
PDF: 5 pages
Proc. SPIE 4348, Fourth International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering, (1 February 2001); doi: 10.1117/12.417686
Show Author Affiliations
Alexander A. Kouleshoff, Belorussian State Univ. (Belarus)
Vladislav V. Nelayev, Belorussian State Univ. of Informatics and Radioelectronics (Belarus)


Published in SPIE Proceedings Vol. 4348:
Fourth International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering
Alexander I. Melker, Editor(s)

© SPIE. Terms of Use
Back to Top