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Proceedings Paper

Optimization of integrated circuit technology
Author(s): Wieslaw B. Kuzmicz; Viktor S. Malyshev; Vladislav V. Nelayev; Viktor R. Stempitsky
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Paper Abstract

Process parameters optimization in device/integrated circuits (IC) technology is an important and essential stage in the modern industrial cycle of the microelectronics industry. The use of the progressive computer and information technique enables to resolve this problem. Algorithms and results are presented for optimization of process parameters from the viewpoint of providing with acceptable deviations of IC devices performances. As input data for optimization we used results of real experiments obtained in industrial conditions. SPICE parameters of n-MOS transistor were analyzed.

Paper Details

Date Published: 1 February 2001
PDF: 4 pages
Proc. SPIE 4348, Fourth International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering, (1 February 2001); doi: 10.1117/12.417685
Show Author Affiliations
Wieslaw B. Kuzmicz, Warsaw Univ. of Technology (Poland)
Viktor S. Malyshev, Scientific Design Enterprise Belmicrosystems (Belarus)
Vladislav V. Nelayev, Belorussian State Univ. of Informatics and Radioelectronics (Belarus)
Viktor R. Stempitsky, Belorussian State Univ. of Informatics and Radioelectronics (Belarus)


Published in SPIE Proceedings Vol. 4348:
Fourth International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering
Alexander I. Melker, Editor(s)

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