Share Email Print
cover

Proceedings Paper

Microscale effects of silicon-on-glass micromechanical devices: experimental results and 3D finite element modeling
Author(s): Alexei I. Borovkov; Evgenij N. Pyatishev; Mihail S. Lurie; E. V. Pereyaslavets; V. P. Lunev; A. N. Kazakin; Irina V. Popova; A. M. Lestiev
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

The sensors measuring parameters of mobile objects are the important components of modern inertial systems. They should have sufficient accuracy, tiny sizes, and low cost at high reliability in operation. From all types of sensitive elements micromechanical gyroscopes and accelerometers most full meet the requirements mentioned above. Development of micromechanical sensitive elements is connected with the technology used in solid-state microelectronics (photolithography, isotropic and anisotropic etching, etc.) and application of nonmetallic materials (monocrystal silicon, silicon carbide, quartz, piezoceramics, etc.). Small-sized inertial navigating systems on the basis of micromechanical sensors at the appropriate integration with Global Positioning System (GPS) receivers provide high enough accuracy in the decision of navigation, orientation, and management problems. In this paper some experimental results received at manufacturing of a micromechanical vibrogyroscope are discussed. More full research of the given vibrosensor including reception of new practical results is carried out with the help of 3D finite element analysis.

Paper Details

Date Published: 1 February 2001
PDF: 8 pages
Proc. SPIE 4348, Fourth International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering, (1 February 2001); doi: 10.1117/12.417674
Show Author Affiliations
Alexei I. Borovkov, St. Petersburg State Technical Univ. and CAD-FEM GmbH (Russia)
Evgenij N. Pyatishev, St. Petersburg State Technical Univ. (Russia)
Mihail S. Lurie, St. Petersburg State Technical Univ. (Russia)
E. V. Pereyaslavets, St. Petersburg State Technical Univ. and CAD-FEM GmbH (Russia)
V. P. Lunev, St. Petersburg State Technical Univ. (Russia)
A. N. Kazakin, St. Petersburg State Technical Univ. (Russia)
Irina V. Popova, GYROOPTICS Co., Ltd. (Russia)
A. M. Lestiev, GYROOPTICS Co., Ltd. (Russia)


Published in SPIE Proceedings Vol. 4348:
Fourth International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering

© SPIE. Terms of Use
Back to Top