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Proceedings Paper

3D finite element modeling of micromachined pressure sensor
Author(s): Alexei I. Borovkov; Evgenij N. Pyatishev; Mihail S. Lurie; Y. D. Akulshin; E. V. Pereyaslavets
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Paper Abstract

The paper presents 3D finite element (FE) approach to modeling pressure microsensor. It consists of two basic parts. In the first part the 3D finite element modeling itself is presented. The second part of the work deals with the FE structural and modal analysis of different 3D FE models. These researches will allow improve characteristics of the given sensor with the purpose of its further practical application.

Paper Details

Date Published: 1 February 2001
PDF: 10 pages
Proc. SPIE 4348, Fourth International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering, (1 February 2001); doi: 10.1117/12.417671
Show Author Affiliations
Alexei I. Borovkov, St. Petersburg State Technical Univ. and CAD-FEM GmbH (Russia)
Evgenij N. Pyatishev, St. Petersburg State Technical Univ. (Russia)
Mihail S. Lurie, St. Petersburg State Technical Univ. (Russia)
Y. D. Akulshin, St. Petersburg State Technical Univ. (Russia)
E. V. Pereyaslavets, St. Petersburg State Technical Univ. (Russia)


Published in SPIE Proceedings Vol. 4348:
Fourth International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering
Alexander I. Melker, Editor(s)

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