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Proceedings Paper

Design flow for MOEMS
Author(s): Arthur S. Morris; Stephen F. Bart; Derek Kane; Gunar Lorenz; Vladimir L. Rabinovich
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Paper Abstract

As MOEMS transition from laboratory curiosities to production products inserted into telecommunication systems, a complete design flow is necessary for rapid product development to minimize time-to-market. We present a MOEMS design flow that provides efficient top-down design and accurate bottom-up verification. The detailed MOEMS device design is addressed along with an integrated capability for including other optical elements, packaging, opto- electronics, as well as drive and control electronics.

Paper Details

Date Published: 6 March 2001
PDF: 8 pages
Proc. SPIE 4198, Optomechanical Engineering 2000, (6 March 2001); doi: 10.1117/12.417352
Show Author Affiliations
Arthur S. Morris, Microcosm Technologies, Inc. (United States)
Stephen F. Bart, Microcosm Technologies, Inc. (United States)
Derek Kane, Microcosm Technologies, Inc. (United States)
Gunar Lorenz, Microcosm Technologies, Inc. (United States)
Vladimir L. Rabinovich, Microcosm Technologies, Inc. (United States)


Published in SPIE Proceedings Vol. 4198:
Optomechanical Engineering 2000
Mark A. Kahan, Editor(s)

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