Share Email Print

Proceedings Paper

Nanometer-class structural actuators and instruments for subnanometer metrology
Author(s): Alson E. Hatheway
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

The author has recently completed the development of a series of structural actuators for supporting the segments of the primary mirror in various configurations of NASA's Next Generation Space Telescope. Separately, the author has been developing a `calibrated displacement actuator' for use in calibrating metrology instruments used to make nanometer- scale measurements. This paper reports on the performance of both the calibrated displacement actuator called `HECTOR- 100tm' and the Rubicontm structural actuator. It also discusses the benefits of incorporating a HECTOR-100- type actuator as a hyperfine third stage in a structural actuator for controlling mirror surfaces for very high resolution imaging as possibly in the visible or UV portions of the spectrum.

Paper Details

Date Published: 6 March 2001
PDF: 6 pages
Proc. SPIE 4198, Optomechanical Engineering 2000, (6 March 2001); doi: 10.1117/12.417350
Show Author Affiliations
Alson E. Hatheway, Alson E. Hatheway, Inc. (United States)

Published in SPIE Proceedings Vol. 4198:
Optomechanical Engineering 2000
Mark A. Kahan, Editor(s)

© SPIE. Terms of Use
Back to Top