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Proceedings Paper

Micromotion measurement system for millistructure using diffraction grating
Author(s): Eui Won Bae; Jong-Ahn Kim; Soo Hyun Kim; Yoon Keun Kwak
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Paper Abstract

12 Current technological development toward miniaturization requires smaller components. These components usually generate complex multi-DOF motions other than simple 1-DOF mission. Therefore it is essential to develop measurement methodology for 6-DOF motions. In this paper, a new 6-DOF measurement system for milli-structure is presented. This methodology basically employs the Optical Beam Deflection Method with a diffraction grating. A laser beam is emitted toward the diffraction grating which could be attached on the surface of a milli-structure and the incident ray is diffracted in several directions. Among these diffracted beams, 0th and +/- 1th order diffracted rays are detected by 4 Quadrant Photodiodes. From coordinate values from each detector, we can get information for 6-DOF motions with linearization method. Required resolutions for milli- structure measurement are sub-micrometer in translation and arcsec in rotation. Experimental results indicate that proposed system has possibility to satisfy this requirement. This method can be applied to measurement of various applications such as arm head of HDD, micro positioning stages.

Paper Details

Date Published: 12 February 2001
PDF: 9 pages
Proc. SPIE 4190, Optomechatronic Systems, (12 February 2001); doi: 10.1117/12.417235
Show Author Affiliations
Eui Won Bae, Korea Advanced Institute of Science and Technology (South Korea)
Jong-Ahn Kim, Korea Advanced Institute of Science and Technology (South Korea)
Soo Hyun Kim, Korea Advanced Institute of Science and Technology (South Korea)
Yoon Keun Kwak, Korea Advanced Institute of Science and Technology (South Korea)


Published in SPIE Proceedings Vol. 4190:
Optomechatronic Systems
Hyungsuck Cho; George K. Knopf, Editor(s)

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