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Proceedings Paper

Design and fabrication of near-field microscope using solid immersion lens
Author(s): Hyoung Kil Yoon; Sunglim Park; Jun Hee Lee; Jungwoo Seo; Dae gab Gweon
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Paper Abstract

12 In this paper, we designed and made a solid immersion lens (SIL) microscope using SIL (diameter equals 1 mm, refractive index n equals 1.83). Through the real experiment, we obtained the scanned-surface image of 700 nm and 300 nm standard specimens using SIL effect (compared with it's SEM scanning picture) an analyzed the result and error of image and system. According to this paper we can assure the capability of SIL microscope and possibility of the development of high-area density, large-capacity data storage device.

Paper Details

Date Published: 12 February 2001
PDF: 8 pages
Proc. SPIE 4190, Optomechatronic Systems, (12 February 2001); doi: 10.1117/12.417219
Show Author Affiliations
Hyoung Kil Yoon, Korea Advanced Institute of Science and Technology (South Korea)
Sunglim Park, Korea Advanced Institute of Science and Technology (South Korea)
Jun Hee Lee, Korea Advanced Institute of Science and Technology (South Korea)
Jungwoo Seo, Korea Advanced Institute of Science and Technology (South Korea)
Dae gab Gweon, Korea Advanced Institute of Science and Technology (South Korea)


Published in SPIE Proceedings Vol. 4190:
Optomechatronic Systems
Hyungsuck Cho; George K. Knopf, Editor(s)

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